2018-03-26 - Rick Merritt
2nm: End of the Road?
The law of diminishing returns may prove anything smaller than 5nm difficult
2018-02-27 - Rick Merritt
Challenges, Defects in 5nm EUV
Differing forecasts on 5nm EUV manufacturing process as Imec researchers uncover random defects
2018-01-19 - Nitin Dahad, EE Times
EUV Backlog Grows as ASML Sets Sales Record
CEO says preparation to insert next-generation EUV lithography into volume manufacturing "shifted into a higher gear" last year.
2017-09-13 - Dylan McGrath
Samsung Says EUV on Schedule for 2018
Confirms it expects to use next-generation lithography technology with 7nm process next year; adds 11nm low power plus process to…
2017-09-12 - Rick Merritt
Chip Execs More Bullish on EUV
Most chips execs believe EUV lithography will be used in volume production before 2021 but mask costs continue to rise,…