Keithley device tests 300mm wafers in 200mm test times

Keithley Instruments Inc. has expanded its S600 series with the release of the S680DC/RF parametric test system that allows control of 300mm wafer processes in 200mm test times. The optional SimulTest parallel test software measures up to nine devices simultaneously within a single probe touchdown.

The improved source-measure units (SMUs) retain the low current and high power capabilities of earlier units. An enhanced AdapTest Software option adds intelligence to the wafer testing process, allowing the device to change test plans automatically in real time, based on die-level results. When used with suitable test structures, the system’s RF test features enable execution of simultaneous independent DC and RF tests up to 40GHz on separate probes. Its single-wire 300mm SECS/GEM automation is fully compliant with SEMI and GJG factory standards, and its architecture allows seamless integration of the automation capability into each fab’s operations.

The 40GHz test option of the S680DC/RF System allows accurate characterization of equivalent (electrical) thickness of ultra-thin gate dielectrics, revealing structure subtleties that might not have been seen previously. It also provides production s-parameter measurements for process control of high performance BiCMOS processes.

Additional instrument options are available for specific test needs, including remote testhead pre-amps, C-V meters, pulse generators, LCR meters, frequency counters and spectrum analyzers.