2018-03-02 - Rick Merritt
3nm Node Set for 2023 Production?
Cadence and Imec making strides, projecting tapeout of 64-bit CPU as early as late 2018
2018-02-27 - Rick Merritt
Challenges, Defects in 5nm EUV
Differing forecasts on 5nm EUV manufacturing process as Imec researchers uncover random defects
2018-02-18 - Vivek Bakshi
Challenges and Milestones in EUV
EUV lithography faces short-term gains and long-term challenges in resist, actinic inspection, mask and mask pellicles and light sources.
2018-01-19 - Nitin Dahad, EE Times
EUV Backlog Grows as ASML Sets Sales Record
CEO says preparation to insert next-generation EUV lithography into volume manufacturing "shifted into a higher gear" last year.